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Core Semiconductor Manufacturing Equipment and Components Development Forum
Time:2026-09-09
Venue:Conference Room, Hall 16
Language:CN

Organizer:

International Integrated Circuit Innovation Expo (IICIE)

Semiconductor equipment and processes are the foundation of chip manufacturing, directly determining performance, yield, and cost, while serving as the bedrock for strategic industries such as AI and high-performance computing. Core precision components provide the physical carrier and functional foundation for advanced equipment.


With high technical barriers, component performance directly determines equipment stability and process boundaries. The global high-end market is dominated by U.S., Japan, and Europe. Bottlenecks in areas such as EUV lithography often trace back to constraints in critical component supply.


As the global semiconductor landscape transforms, China has achieved large-scale substitution in mature process equipment (28nm) and reached advanced levels in certain packaging and testing processes. However, challenges remain in advanced equipment and sub-3nm processes. Localization and technological
iteration is urgent. Breakthroughs in equipment
depend on collaborative innovation with upstream core components.


This forum will focus on innovative technologies and trends in semiconductor equipment and components, explore pathways for localization and self-reliance, and promote synergistic development to enhance the overall competitiveness of the semiconductor industry chain.

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Conference Agenda

Core Semiconductor Manufacturing Equipment and Components Development Forum
TimeTopicsSpeakers
13:30-13:35Opening
13:35-13:55Opportunities and Challenges of High-Voltage Electron Beam Equipment (HV-SEM) in Advanced ProcessesZhen Wang, HV-SEM Director, DJEL.
13:55-14:15Independent research and development of high-end vacuum feedthroughs and import substitutionAn Sun, Professor, doctoral supervisor and academician of Nanjing University & Chairman of Jiangsu Andesun Accelerator Co., Ltd.
14:15-14:35TBCAMEC / NAURA / Yitang Semiconductor
HWATSING / PIOTECH / LEUVEN
14:35-14:55Opportunities and Challenges for Wafer Grinding Equipment in the AI EraShenghui Leng, Vice General Manager, CETC BEIJING ELECTRONIC EQUIPMENT CO.,LTD.
14:55-15:15A Scalable HIPIMS – RF Bias Strategy for Reliable Cu Seed Layers in High-AR Through Glass ViasYilei Shen, Industry Manager Industrial Coating, TRUMPF Hüttinger GmbH + Co. KG.
15:15-15:35Key Equipment and Core Technology Breakthroughs in Advanced PackagingWanqun Chen, VP & CTO, Maxwell Technologies (Zhuhai) Co., Ltd.
15:35-15:55Key Front-End Equipment for Semiconductor Processing: Collaborative Innovation from Atomic Layer Deposition to Ion ImplantationXianglong Chen, VP, Qingdao SRI Intellectual Technology Co., Ltd.
15:55-16:15TBCSystem Technology (Zhejiang) Co.,Ltd.
16:15-16:35Seeing Around the Corner: Where to Look for AI Infrastructure's Next BottleneckGary Huang, Corp VP, Head of Asia Pacific – Research and Business Development, YOLE Group.

Guest Introduction

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