Serving as the energy hub and environmental steward of semiconductor manufacturing, the facility management system accounts for nearly 60% of the factory’s total energy consumption and 80% of its water usage. The depth and scope of its green transformation are directly tied to the sustainable development capacity of the semiconductor industrial chain and the fulfillment of global carbon footprint commitments. Semiconductor factories adopt comprehensive solutions leveraging technological innovations and managerial optimizations to cut energy consumption, reduce pollutant emissions, boost resource recycling, and ensure safe plant operation. These efforts aim to mitigate the environmental impacts stemming from the inherently high energy and water intensity of semiconductor manufacturing.